TaN Tantalum Nitride Powder CAS 12033-62-4

Tantalum Nitride (TaN) is a high-performance refractory ceramic renowned for its exceptional hardness, thermal stability (up to 3000°C), and metallic conductivity. This gold-brown crystalline material is widely used in semiconductor manufacturing, extreme environment coatings, and precision resistors, offering unique properties that bridge ceramics and metals.

Ultra-High Stability: No phase changes below 2000°C in vacuum
Barrier Performance: Blocks Cu diffusion at ≤5nm thickness
Process Compatibility: Excellent adhesion to SiO₂ and low-κ dielectrics
Tunable Resistivity: Controlled via N₂ flow during sputtering

product details

Properties

- - Chemical Formula: TaN
    
    Composition: N:7.18%, Ta:92.82%
    
    Molecular Weight: 194.95 g/mol
    
    Density: 13.4–14.6 g/cm³
    
    Crystal Structure: Hexagonal (ε-phase, space group P6₃/mmc)
    
    Melting Point: ~3090°C (decomposes)
    
    Vickers Hardness: 18–22 GPa
    
    Electrical Resistivity: 200–300 μΩ·cm
    
    Purity: 99.5% (standard), 99.95% (semiconductor grade)

Products Usage

1. Semiconductor Industry:

Diffusion barrier layer in Cu interconnects (45nm–5nm nodes)

Gate electrode material in advanced CMOS devices

2. Cutting Tools: Coating for carbide inserts (TiAlN/TaN multilayers)

3. Precision Electronics: Thin-film resistors (50–1000 Ω/sq, ±1% tolerance)

4. Medical Implants: Corrosion-resistant coating for surgical tools

5. Space Technology: Thermal protection for re-entry vehicles

Packing:

Our normal packaging is 25kgs/Drum

The packaging can be customized. the shipping term can be by sea, by air, and sample or small quantity can be shipped by DHL, FEDEX, EMS and TNT.

Remark: Chemical composition and size can be optimized by the customers' requirements 固体通用s27

Conditions for safe storage, including any incompatibilities

Separated from ammonia, strong hydrogen peroxide solutions and strong acids.

Safety Protection

Precautions for safe handling

Handling in a well ventilated place. Wear suitable protective clothing. Avoid contact with skin and eyes. Avoid formation of dust and aerosols. Use non-sparking tools. Prevent fire caused by electrostatic discharge steam.